The development of a prototype Zone-Plate-Array Lithography (ZPAL) system
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/18054 |
| _version_ | 1826196374586130432 |
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| author | Patel, Amil Ashok, 1979- |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Patel, Amil Ashok, 1979- |
| author_sort | Patel, Amil Ashok, 1979- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. |
| first_indexed | 2024-09-23T10:25:32Z |
| format | Thesis |
| id | mit-1721.1/18054 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:25:32Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/180542019-04-11T02:49:27Z The development of a prototype Zone-Plate-Array Lithography (ZPAL) system Patel, Amil Ashok, 1979- Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. Includes bibliographical references (p. 75-77). The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics. by Amil Ashok Patel. S.M. 2005-06-02T19:47:31Z 2005-06-02T19:47:31Z 2004 2004 Thesis http://hdl.handle.net/1721.1/18054 57384404 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 77 p. 4461842 bytes 4469984 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Patel, Amil Ashok, 1979- The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title | The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title_full | The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title_fullStr | The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title_full_unstemmed | The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title_short | The development of a prototype Zone-Plate-Array Lithography (ZPAL) system |
| title_sort | development of a prototype zone plate array lithography zpal system |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/18054 |
| work_keys_str_mv | AT patelamilashok1979 thedevelopmentofaprototypezoneplatearraylithographyzpalsystem AT patelamilashok1979 developmentofaprototypezoneplatearraylithographyzpalsystem |