The effects of mechanical coupling on the electrical impedance of MEMS resonators for UHF filter applications

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2004.

Bibliographic Details
Main Author:	Hohreiter, Luke A. (Luke Alfred), 1979-
Other Authors:	Amy E. Duwel.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/27080

Internet

http://hdl.handle.net/1721.1/27080