Contact thermal lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2004.

Bibliographic Details
Main Author:	Schmidt, Aaron Jerome, 1979-
Other Authors:	Gang Chen.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/27116

Internet

http://hdl.handle.net/1721.1/27116