Multiscale modeling of chemical vapor deposition and plasma etching

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2000.

Bibliographic Details
Main Author:	Rodgers, Seth Thomas, 1970-
Other Authors:	Klavs F. Jensen.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/28219

Internet

http://hdl.handle.net/1721.1/28219