Development of novel alternative chemistry processes for dielectric etch applications

Development of novel alternative chemistry processes for dielectric etch applications

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Detaylı Bibliyografya
Yazar: Karecki, Simon Martin
Diğer Yazarlar: L. Rafael Reif.
Materyal Türü: Tez
Dil:en_US
Baskı/Yayın Bilgisi: Massachusetts Institute of Technology 2005
Konular:
Electrical Engineering and Computer Science.
Online Erişim:http://hdl.handle.net/1721.1/28224

Internet

http://hdl.handle.net/1721.1/28224

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