Development of novel alternative chemistry processes for dielectric etch applications

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Bibliographic Details
Main Author:	Karecki, Simon Martin
Other Authors:	L. Rafael Reif.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/28224

Internet

http://hdl.handle.net/1721.1/28224