Karecki, S. M., & Reif, L. R. (2005). Development of novel alternative chemistry processes for dielectric etch applications. Massachusetts Institute of Technology.
Chicago Style (17th ed.) CitationKarecki, Simon Martin, and L. Rafael Reif. Development of Novel Alternative Chemistry Processes for Dielectric Etch Applications. Massachusetts Institute of Technology, 2005.
MLA (9th ed.) CitationKarecki, Simon Martin, and L. Rafael Reif. Development of Novel Alternative Chemistry Processes for Dielectric Etch Applications. Massachusetts Institute of Technology, 2005.
Warning: These citations may not always be 100% accurate.