Chemical vapor deposition thin films as biopassivation coatings and directly patternable dielectrics

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2001.

Bibliographic Details
Main Author:	Pryce Lewis, Hilton G. (Hilton Gavin), 1973-
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/28237

Internet

http://hdl.handle.net/1721.1/28237