X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Détails bibliographiques
Auteur principal:	Meinhold, Mitchell W., 1972-
Autres auteurs:	Henry I. Smith.
Format:	Thèse
Langue:	en_US
Publié:	Massachusetts Institute of Technology 2005
Sujets:	Electrical Engineering and Computer Science.
Accès en ligne:	http://hdl.handle.net/1721.1/28271

Internet

http://hdl.handle.net/1721.1/28271