X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Détails bibliographiques
Auteur principal: Meinhold, Mitchell W., 1972-
Autres auteurs: Henry I. Smith.
Format: Thèse
Langue:en_US
Publié: Massachusetts Institute of Technology 2005
Sujets:
Accès en ligne:http://hdl.handle.net/1721.1/28271