X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author:	Meinhold, Mitchell W., 1972-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/28271

Internet

http://hdl.handle.net/1721.1/28271