Piezoelectric MEMS resonator characterization and filter design

Thesis (M. Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author:	Kang, Joung-Mo, 1978-
Other Authors:	Amy E. Duwel and Charles G. Sodini.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/28418

Internet

http://hdl.handle.net/1721.1/28418