Piezoelectric MEMS resonator characterization and filter design

Thesis (M. Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Détails bibliographiques
Auteur principal: Kang, Joung-Mo, 1978-
Autres auteurs: Amy E. Duwel and Charles G. Sodini.
Format: Thèse
Langue:en_US
Publié: Massachusetts Institute of Technology 2005
Sujets:
Accès en ligne:http://hdl.handle.net/1721.1/28418