Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2005.

Bibliographic Details
Main Author:	Rasgon, Stacy A., 1974-
Other Authors:	Herbert H. Swain.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/28843

Internet

http://hdl.handle.net/1721.1/28843