The electromigration drift velocity and the reliability of dual-damascene copper interconnect trees

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2004.

Bibliographic Details
Main Author:	Wei, Frank L. (Frank Lili), 1977-
Other Authors:	Carl V. Thompson.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/30124

Internet

http://hdl.handle.net/1721.1/30124