Scanning probe microscopy with inherent disturbance suppression using micromechanical systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.

Bibliographic Details
Main Author:	Sparks, Andrew William, 1977-
Other Authors:	Scott R. Manalis and Anne M. Mayes.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Materials Science and Engineering.
Online Access:	http://dspace.mit.edu/handle/1721.1/30249 http://hdl.handle.net/1721.1/30249

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