Sputtered silicon oxynitride for microphotonics : a materials study

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, February 2005.

Bibliographic Details
Main Author:	Sandland, Jessica Gene, 1977-
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/30250

Internet

http://hdl.handle.net/1721.1/30250