Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Rasera, Roy L. (Roy Louis)
Other Authors:	Joseph B. Bernstein.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/32180

Internet

http://hdl.handle.net/1721.1/32180