Crystallization in self-implanted polycrystalline silicon-on-insulator films

Bibliography: leaves 118-122.

Bibliographic Details
Main Author:	Iverson, Ralph Benhart
Other Authors:	L. Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/32570

Internet

http://hdl.handle.net/1721.1/32570