Crystallization in self-implanted polycrystalline silicon-on-insulator films
Bibliography: leaves 118-122.
Main Author: | Iverson, Ralph Benhart |
---|---|
Other Authors: | L. Rafael Reif. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2006
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/32570 |
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