Feasibility study of spatial-phase-locked focused-ion-beam lithography

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Yasaka, Anto
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/32663

Internet

http://hdl.handle.net/1721.1/32663