Feasibility study of spatial-phase-locked focused-ion-beam lithography
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/32663 |
| _version_ | 1811073717103493120 |
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| author | Yasaka, Anto |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Yasaka, Anto |
| author_sort | Yasaka, Anto |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. |
| first_indexed | 2024-09-23T09:37:29Z |
| format | Thesis |
| id | mit-1721.1/32663 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:37:29Z |
| publishDate | 2006 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/326632019-04-11T10:27:24Z Feasibility study of spatial-phase-locked focused-ion-beam lithography Yasaka, Anto Henry I. Smith. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 66-68). by Anto Yasaka. M.S. 2006-05-15T20:19:54Z 2006-05-15T20:19:54Z 1995 1995 Thesis http://hdl.handle.net/1721.1/32663 33976490 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 68 leaves 3530072 bytes 3532314 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Yasaka, Anto Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title_full | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title_fullStr | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title_full_unstemmed | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title_short | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| title_sort | feasibility study of spatial phase locked focused ion beam lithography |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/32663 |
| work_keys_str_mv | AT yasakaanto feasibilitystudyofspatialphaselockedfocusedionbeamlithography |