HF vapor etching and cleaning of silicon wafer surfaces

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.

Bibliographic Details
Main Author:	Han, Yong-Pil, 1962-
Other Authors:	Herbert H. Sawin.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/32698

Internet

http://hdl.handle.net/1721.1/32698