Accurate nanofabrication techniques for high-index-contrast microphotonic devices

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.

Bibliographic Details
Main Author:	Barwicz, Tymon
Other Authors:	Henry I. Smith and Harry L. Tuller.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/33169

Internet

http://hdl.handle.net/1721.1/33169