Initiated chemical vapor deposition of polymeric thin films : mechanism and applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2005.

Bibliographic Details
Main Author:	Chan, Kelvin, Ph. D. Massachusetts Institute of Technology
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/33702

Internet

http://hdl.handle.net/1721.1/33702