$A variable capacitor made from single crystal silicon fracture surface pairs$

A variable capacitor made from single crystal silicon fracture surface pairs

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.

Bibliographic Details
Main Author:	Sprunt, Alexander D. (Alexander Dalziel), 1977-
Other Authors:	Alexander H. Slocum.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/33917

Internet

http://hdl.handle.net/1721.1/33917