Real-time spatial-phase-locked electron-beam lithography

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.

Bibliographic Details
Main Author:	Zhang, Feng, 1973-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://dspace.mit.edu/handle/1721.1/34460 http://hdl.handle.net/1721.1/34460

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