Low temperature deposition of metal carbide films from single source precursors

Low temperature deposition of metal carbide films from single source precursors

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1994, and Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science & Engineering, 1994.

Bibliographic Details
Main Author: Rubiano, Rodrigo R. (Rubiano Ray)
Other Authors: Uday, B. Pal.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2006
Subjects:
Nuclear Engineering
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/34692

Internet

http://hdl.handle.net/1721.1/34692

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