Implementation of a design rule checker for silicon wafer fabrication

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliographic Details
Main Author:	Unver, Evren R. (Evren Rifki)
Other Authors:	Donald E. Troxel, Michael B. McIlrath.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/35387

Internet

http://hdl.handle.net/1721.1/35387