A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.

Bibliographic Details
Main Author:	Yang, Xue'en, 1975-
Other Authors:	Alexander H. Slocum.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/35617

Internet

http://hdl.handle.net/1721.1/35617