A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.
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Diğer Yazarlar: | |
Materyal Türü: | Tez |
Dil: | eng |
Baskı/Yayın Bilgisi: |
Massachusetts Institute of Technology
2007
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Online Erişim: | http://hdl.handle.net/1721.1/35617 |
Özet: | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005. |
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