Temperature homogenization with tungsten absorber on X-ray mask
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2007
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/35964 |
| _version_ | 1826212115787022336 |
|---|---|
| author | Li, Huiying |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Li, Huiying |
| author_sort | Li, Huiying |
| collection | MIT |
| description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. |
| first_indexed | 2024-09-23T15:16:37Z |
| format | Thesis |
| id | mit-1721.1/35964 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:16:37Z |
| publishDate | 2007 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/359642019-04-11T13:33:15Z Temperature homogenization with tungsten absorber on X-ray mask Li, Huiying Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (leaves 53-55). by Huiying Li. M.Eng. 2007-02-21T10:06:30Z 2007-02-21T10:06:30Z 1994 1994 Thesis http://hdl.handle.net/1721.1/35964 31163384 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 55 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Li, Huiying Temperature homogenization with tungsten absorber on X-ray mask |
| title | Temperature homogenization with tungsten absorber on X-ray mask |
| title_full | Temperature homogenization with tungsten absorber on X-ray mask |
| title_fullStr | Temperature homogenization with tungsten absorber on X-ray mask |
| title_full_unstemmed | Temperature homogenization with tungsten absorber on X-ray mask |
| title_short | Temperature homogenization with tungsten absorber on X-ray mask |
| title_sort | temperature homogenization with tungsten absorber on x ray mask |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/35964 |
| work_keys_str_mv | AT lihuiying temperaturehomogenizationwithtungstenabsorberonxraymask |