Temperature homogenization with tungsten absorber on X-ray mask

Temperature homogenization with tungsten absorber on X-ray mask

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliographic Details
Main Author: Li, Huiying
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/35964

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