Data processing in nanoscale profilometry

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.

Bibliographic Details
Main Author:	Chiu, Cheng-Jung
Other Authors:	Kamal Youcef-Toumi.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/36677

Internet

http://hdl.handle.net/1721.1/36677