Face-up chemical mechanical polishing : kinematics and material removal rate

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.

Bibliographic Details
Main Author:	Shieh, Marvin Bryan
Other Authors:	Jung-Hoon Chun and Nannaji Saka.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/36701

Internet

http://hdl.handle.net/1721.1/36701