Face-up chemical mechanical polishing : kinematics and material removal rate

Face-up chemical mechanical polishing : kinematics and material removal rate

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.

Bibliographic Details
Main Author: Shieh, Marvin Bryan
Other Authors: Jung-Hoon Chun and Nannaji Saka.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/36701

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