6.152J / 3.155J Microelectronics Processing Technology, Fall 2003

6.152J / 3.155J Microelectronics Processing Technology, Fall 2003

Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properti...

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Bibliographic Details
Main Authors: Schmidt, Martin A., O'Handley, Robert C., 1942-, Ruff, Susan
Language:en-US
Published: 2003
Subjects:
microelectronics
Microelectronics processing
integrated circuits
vacuum
chemical vapor deposition
CVD
oxidation
diffusion
implantation
lithography
soft lithography
etching
sputtering
evaporation
interconnect
metallization
crystal growth
reliability
fabrication
processing
photolithography
physical vapor deposition
MOS
MOS capacitor
microcantilever
microfluidic
6.152J
3.155J
6.152
3.155
Online Access:http://hdl.handle.net/1721.1/36872

Internet

http://hdl.handle.net/1721.1/36872

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