6.152J / 3.155J Microelectronics Processing Technology, Fall 2003
Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properti...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Learning Object |
| Language: | en-US |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/36872 |