Orientation of MgO thin films on Si(001) prepared by pulsed laser deposition
Pulsed laser deposition method was employed to grow MgO thin films with preferred orientation on bare Si(100) and SiO₂/Si(100) substrates. The orientation of MgO thin films was systematically investigated by varying deposition parameters. XRD analysis showed that the preferred orientation of MgO thi...
| Main Authors: | , |
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| Format: | Article |
| Language: | en_US |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/3728 |