Spatial yield modeling for semiconductor wafers

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author: Mirza, Agha Irtaza
Other Authors: Alvin W. Drake.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Online Access:http://hdl.handle.net/1721.1/37537