Spatial yield modeling for semiconductor wafers

Spatial yield modeling for semiconductor wafers

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author:	Mirza, Agha Irtaza
Other Authors:	Alvin W. Drake.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/37537

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