Silicon-Germanium interdiffusion and its impacts on enhanced mobility MOSFETs

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2006.

Bibliographic Details
Main Author:	Xia, Guangrui, 1976-
Other Authors:	Judy L. Hoyt.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/37840

Internet

http://hdl.handle.net/1721.1/37840