Growth and Properties of (001)-oriented Pb(Zr₀.₅₂Ti₀.₄₈)O₃/LaNiO₃ Films on Si(001) Substrates with TiN Buffer Layers

Growth and Properties of (001)-oriented Pb(Zr₀.₅₂Ti₀.₄₈)O₃/LaNiO₃ Films on Si(001) Substrates with TiN Buffer Layers

Pulsed laser deposition has been used to grow Pb(Zr₀.₅₂Ti₀.₄₈)O₃ (PZT)/LaNiO₃ (LNO) heterostructures with restricted crystallographic orientations on bare Si(001) and SiO₂-coated Si(001) substrates, using TiN buffer layers. The effect of background gas pressure on orientation of the thin films was...

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Bibliographic Details
Main Authors: Zhu, Tie-Jun, Lu, Li, Thompson, Carl V.
Format: Article
Language:en_US
Published: 2003
Subjects:
pulsed laser deposition
ferroelectric thin films
PZT
crystallographic orientation
ferroelectric properties
Online Access:http://hdl.handle.net/1721.1/3829

Internet

http://hdl.handle.net/1721.1/3829

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