Room temperature micromachined microbolometers for W-band (75 GHz-110 GHz) focal plane imaging array
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2007
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Online Access: | http://hdl.handle.net/1721.1/38847 |