Etching kinetics and surface roughening of polysilicon and dielectric materials in inductively coupled plasma beams

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2007.

Bibliographic Details
Main Author:	Yin, Yunpeng, Ph. D. Massachusetts Institute of Technology
Other Authors:	Herbert H. Swain.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Chemical Engineering.
Online Access:	http://dspace.mit.edu/handle/1721.1/38973 http://hdl.handle.net/1721.1/38973

Internet