Fabrication of distortion free x-ray masks using low stress tungsten

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.

Bibliographic Details
Main Author:	Ku, Yao-Ching
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/39038

Internet

http://hdl.handle.net/1721.1/39038