A Lab Scale Polymer Micro-Embossing Machine for Process Control Research

Micro embossing is the process of fabricating micron-sized features by plastic deformation of a work piece by means of a shaped tool or die. In our work we are concerned with hot embossing of PMMA to produce features in the 1-100 µm range, suited for micro fluidic and photonic product requirements....

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Bibliographic Details
Main Authors: Ganesan, Bala, Hardt, David E.
Format: Article
Language:en_US
Published: 2003
Subjects:
Online Access:http://hdl.handle.net/1721.1/3907