Automated remote microscope for inspection of integrated circuits

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.

Bibliographic Details
Main Author:	Kittipiyakul, Somsak
Other Authors:	Donald E. Troxel.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/39082

Internet

http://hdl.handle.net/1721.1/39082