Process development of silicon-silicon carbide hybrid structures for micro-engines (January 2002)

Process development of silicon-silicon carbide hybrid structures for micro-engines (January 2002)

MEMS-based gas turbine engines are currently under development at MIT for use as a button-sized portable power generator or micro-aircraft propulsion sources. Power densities expected for the micro-engines require very high rotor peripheral speeds of 300-600m/s and high combustion gas temperatures o...

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Bibliographic Details
Main Authors: Choi, D., Shinavski, R.J., Spearing, S. Mark
Format: Article
Language:en_US
Published: 2003
Subjects:
CVD silicon carbide
residual stress
power-MEMS
micro-engine
microfabrication
microstructure
Online Access:http://hdl.handle.net/1721.1/3983

Internet

http://hdl.handle.net/1721.1/3983

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