Design and prototype fabrication of a manipulator for semiconductor test equipment

Design and prototype fabrication of a manipulator for semiconductor test equipment

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.

Bibliographic Details
Main Author: Vallance, Robert Ryan
Other Authors: Alexander H. Slocum.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/40216

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