Novel techniques for the run by run process control of chemical-mechanical polishing

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.

Bibliographic Details
Main Author:	Smith, Taber H. (Taber Hardesty)
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/40235

Internet

http://hdl.handle.net/1721.1/40235