Two-dimensional simulation of radio-frequency glow discharges

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.

Bibliographic Details
Main Author:	Huppert, Gilbert Lee
Other Authors:	Herbert H. Sawin and Robert A. Brown.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/40574

Internet

http://hdl.handle.net/1721.1/40574