Novel process and apparatus design for metalorganic chemical vapor deposition (MOCVD) of superconducting thin films

Thesis (S.B. and S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.

Bibliographic Details
Main Author:	Hubert, Brian Norio
Other Authors:	John Vander Sande.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/41025

Internet

http://hdl.handle.net/1721.1/41025