A statistical metrology framework for characterizing ILD thickness variation in CMP processes

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.

Bibliographic Details
Main Author:	Chang, Eric Choong-Yin
Other Authors:	James Chung, Duane Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/41383

Internet

http://hdl.handle.net/1721.1/41383